Room-temperature fabrication of epitaxial ZnO thin films on polymer substrates coated with a seed layer of exfoliated β-Ga<sub>2</sub>O<sub>3</sub> single-crystal thin sheets by pulsed laser deposition
نویسندگان
چکیده
Room-temperature (RT) epitaxial growth of ZnO thin films on flexible cyclo-olefin polymer (COP) substrates coated with the exfoliated β-Ga2O3(100) single crystal sheets as a seed layer was investigated using pulsed laser deposition technique. Scanning electron microscopy (SEM) observations and X-ray diffraction (XRD) measurements demonstrated that c-axis-oriented ZnO(0001) were obtained at RT bonded to COP substrate. Also, relationship between ZnO(0001)/β-Ga2O3(100) ZnO[1120] ∥ β-Ga2O3[010] ZnO[1100] β-Ga2O3[001]. The optical transmittance film, including more than 80 % in visible light region. band gap electrical resistivity film estimated be about 3.4 eV 2.1 × 10−3 Ω cm RT, respectively.
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ژورنال
عنوان ژورنال: Journal of the Ceramic Society of Japan
سال: 2023
ISSN: ['1882-0743', '1348-6535']
DOI: https://doi.org/10.2109/jcersj2.22152